ON/OFF MECHANISM FOR VACUUM PATH

PROBLEM TO BE SOLVED: To provide an ON/OFF mechanism for vacuum path, which admits no intrusion of powder of a material to form electronic component or any other foreign matter, capable of making ON/OFF operation individually, and requiring a simple device and easy maintenance. SOLUTION: The ON/OFF...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MURAYAMA HIROYASU, OKAMATSU TAKAYUKI, KAWAHARA KAZUYA, KINOSHITA NOBORU
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide an ON/OFF mechanism for vacuum path, which admits no intrusion of powder of a material to form electronic component or any other foreign matter, capable of making ON/OFF operation individually, and requiring a simple device and easy maintenance. SOLUTION: The ON/OFF mechanism for vacuum path consists of a tube 5 consisting of a hollow elastic material inserted on the way of a vacuum path 9 and put in connection set between a block 4 made of metal and one side ends of pusher pins 6 capable of moving in the horizontal direction, and a turnable turntable 2 on whose oversurface they are installed and a cam 8 fixed to a shaft 3. The peripheral edge of the cam 8 is put in contact with a cam follower 7 installed at the other ends of the pusher pins 6 by the rotation of the turntable 2 so as to cause the pusher pins 6 to move horizontally, and the hollow tube 5 is pressed by their ends to cause deformation so that the pipeline is ON/OFF operated.