MANUFACTURE OF MR TYPE MAGNETIC HEAD
PROBLEM TO BE SOLVED: To provide a method for manufacturing an MR type magnetic head which has no burrs and by which insulation resistance becomes excellent in a short time. SOLUTION: An MR film 5 formed via a lower shield layer 2' and a lower gap layer 4 is formed on a substrate 1, a hard bias...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method for manufacturing an MR type magnetic head which has no burrs and by which insulation resistance becomes excellent in a short time. SOLUTION: An MR film 5 formed via a lower shield layer 2' and a lower gap layer 4 is formed on a substrate 1, a hard bias layer 6 is formed in a prescribed position on the MR film 5, and further, a resist film 7 is formed in a prescribed position on the upper surface of the hard bias layer and the upper surface of the MR film. Then, heat treatment is conducted on this resist layer 7. Thereupon, the flank of the resist layer 7 is inclined. Thus, when unnecessary sections of the MR film 5 are removed by means of an ion mill, readhered materials are removed by the ion mill even if the readhered materials stick to the flank of the resist layer 7. Then, when the resist layer is removed, no burrs remain on the upper surface of the hard bias layer. Heat treatment is conducted to the extent that the flank of the resist layer is inclined and that the resist layer is completely not hardened. |
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