VACUUM TREATMENT DEVICE FOR DEPOSITING THIN FILM

PROBLEM TO BE SOLVED: To simultaneously carry plural base materials formed to any of three- dimensional, shell- or prismatic shapes transported via separate transporting devices into and out of a vacuum chamber via lock gates with one time of working cycle. SOLUTION: The two lock gate stations 10, 20 are positioned to face each other in a diametral direction are arranged in the direction tangent to a vacuum chamber wall 7. One each of the transporting devices 19 or 22 is assigned to these two lock gate stations 10, 20, respectively. These transporting devices alternately carry one piece of the base material into or out of the lock gate stations every time and at this time, the carrying in and out of the base materials 2, 2',... locating within the lock gate areas are executed momentarily according to the rotating motion of an inner cylindrical body. At each of this time, the base materials 2, 2'... are carried from the lock gate station 10 or 20 to a treating station 8 or 9 at the time of the first turning motion. The base materials 2, 2'... are returned from the treating station 8 or 9 to the lock gate station 10 or 20 at the time of the second turning motion.