MANUFACTURE OF NOZZLE PLATE

PROBLEM TO BE SOLVED: To improve the machining precision of a nozzle by a method in which after a film made from a water-repellent, oil-repellent material and an ultraviolet absorbing material being formed on a substrate, a nozzle is formed by emitting laser beams to the nozzle forming place of the substrate, and evaporating the ultraviolet absorbing material by heating the film of the substrate at a prescribed temperature. SOLUTION: In manufacturing a nozzle plate 10, a water-repellent, oil- repellent film 21 is formed on a substrate 20 which constitutes the plate 10 using a heater 70. Next, the plate 10 is set on a working table, and an excimer laser generator is actuated to emit excimer laser beams 2. The beams 2 is emitted to a prescribed place on the substrate 20 to form a nozzle. Next, the plate 10 is placed in a heater 70 and heated at 350-380 deg.C for about one hour to evaporate an ultraviolet absorbing agent contained in the film 21. In this way, the film 21 formed only from a water-repelling, oil-repelling agent is formed to demonstrate the same water repellency and oil repellency as a film formed only from the water-repelling, oil-repelling agent.