AIR CONDITIONER SYSTEM FOR SEMICONDUCTOR CLEANING ROOM

PROBLEM TO BE SOLVED: To chemically remove chemical impurities by mounting a chemical filter at a downstream of a humidifier in an air conditioner. SOLUTION: In the air conditioner system for a semiconductor cleaning room constituted by supplying fresh air cleaned by using an air conditioner having...

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Bibliographische Detailangaben
Hauptverfasser:	RYU NANKI, KO SEISEI, KAN EISHIN, KIN KITO
Format:	Patent
Sprache:	eng
Schlagworte:	AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL RANGES SEMICONDUCTOR DEVICES SEPARATION TRANSPORTING VENTILATING WEAPONS
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