AIR CONDITIONER SYSTEM FOR SEMICONDUCTOR CLEANING ROOM

PROBLEM TO BE SOLVED: To chemically remove chemical impurities by mounting a chemical filter at a downstream of a humidifier in an air conditioner. SOLUTION: In the air conditioner system for a semiconductor cleaning room constituted by supplying fresh air cleaned by using an air conditioner having...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	RYU NANKI, KO SEISEI, KAN EISHIN, KIN KITO
Format:	Patent
Sprache:	eng
Schlagworte:	AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL RANGES SEMICONDUCTOR DEVICES SEPARATION TRANSPORTING VENTILATING WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To chemically remove chemical impurities by mounting a chemical filter at a downstream of a humidifier in an air conditioner. SOLUTION: In the air conditioner system for a semiconductor cleaning room constituted by supplying fresh air cleaned by using an air conditioner having a humidifier to a cleaning rom 5 via a fresh air duct 2, and circulating it out of the room 5 via a fresh air supply damper 3 disposed under a floor of the room 5, a chemical filter 10 for filtering chemical impurities is provided between the conditioner and the room 5 by an ion exchange process. Thus, the impurities can be effectively removed while using an existing dust removing filter as it is without altering the conventional system for the room. And, effective temperature and humidity regulations can be performed without using separate expensive pure steam system.