VACUUM DEVICE

PROBLEM TO BE SOLVED: To provide a vacuum device which neither necessarily requires forcedly pressing of an opening-closing door against the opening part at the time of starting vacuum suction on in a low degree of vacuum, nor vaqueros to keep the space between the opening-closing door and the openi...

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Bibliographische Detailangaben
1. Verfasser:	KONO YOSHISUKE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a vacuum device which neither necessarily requires forcedly pressing of an opening-closing door against the opening part at the time of starting vacuum suction on in a low degree of vacuum, nor vaqueros to keep the space between the opening-closing door and the opening part parallel. SOLUTION: A seal ring 10 is housed in a groove 7 engraved on the opening part 5 of a vacuum container 1. This seal ring 10 is composed of the main body 10a of the ring and primary and secondary projecting pieces 10b and 10c projecting from the main body 10a of the ring. Before the start of vacuum suction for the vacuum vessel 1 or in the case of a low degree of vacuum, the primary projecting piece 10b is brought into contact with the sealing face 9 of an opening-closing door 6 and seals it. In the case the degree of vacuum in the vacuum container 1 is made high, the main body 10a of the ring is callapsed by the sealing face 9 of the opening-closing door 6, is elastically deformed and seals the sealing face 9.