SPINNING TYPE COATING APPARATUS
PROBLEM TO BE SOLVED: To prevent pollution of the circumferential environments with a coating liquid and at the same time, prevent deterioration of the quality of an object to be coated due to re-adhesion of the liquid to the surface of the object to be coated by reliably capturing the coating liqui...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To prevent pollution of the circumferential environments with a coating liquid and at the same time, prevent deterioration of the quality of an object to be coated due to re-adhesion of the liquid to the surface of the object to be coated by reliably capturing the coating liquid which is scattered from the rotating route circumference of the object to be coated placed on a rotating stage in an outer cup for scattering prevention of the coating liquid. SOLUTION: This spinning type coating apparatus is composed of a rotating stage 2 which rotates while holding an object to be coated 1 on it and an outer cup which is made to have an aperture part and so placed as to cover the object 1 to be coated and the rotating stage 2 holding the object 1 and as to set h/w ratio to 0.01-0.20 wherein (h) stands for clearance height (h) from the upper end part of the rotating stage 2 to the lower end part of the aperture part and (w) stands for the diameter of the aperture part, so that the mist of the coating liquid scattered from an outer part 1 of the object 1 to be coated to the surroundings following the rotation of the stage 2 can reliably be captured and, at the same time, re-adhesion to the object 1 to be coated and to the stage can be prevented. |
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