EXCIMER LASER MACHINING DEVICE

PROBLEM TO BE SOLVED: To anneal a TFT part by effectively utilizing the energy of laser light over a large area of a substrate by arranging a lattice-shaped reflecting mirror so that the angle of incidence to a laser optical axis is not zero. SOLUTION: This device is equipped with lattice-shaped ref...

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Bibliographische Detailangaben
Hauptverfasser:	SASAKI HIROHARU, KAWAKUBO YUKIO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DEVICES USING STIMULATED EMISSION ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To anneal a TFT part by effectively utilizing the energy of laser light over a large area of a substrate by arranging a lattice-shaped reflecting mirror so that the angle of incidence to a laser optical axis is not zero. SOLUTION: This device is equipped with lattice-shaped reflecting mirrors 2a and 2b which are composed of two metallic members and a total reflecting mirror 3 which is composed of a metallic member as well. And, laser light 1a which has a large diameter and a uniform intensity distribution is made on the 1st lattice-shaped reflecting mirror 2a which is slanted at 45 deg. to the incidence laser optical axis. The lattice-shaped reflecting mirrors 2a and 2b are in the same shape, their laser beam reflection parts are slid and arranged not to overlap the laser beam, and then a 1st reflected beltlike beam 4a and a 2nd reflected beltlike beam 4b which are in the same shape are generated. Since plural beltlike beams 4a and 4b can be generated at equal intervals by providing plural lattice-shaped reflecting mirrors 2a and 2b, the TFT part can selectively be irradiated and annealed by one shot of the laser.