METHOD FOR DETECTING PHOTOTHERMALLY DISPLACED IMAGE AND DEVICE THEREFOR

PROBLEM TO BE SOLVED: To provide a method for detecting photothermally displaced image and a photothermally displaced image detecting device in which the internal information for the surface of a sample and its vicinity can be two-dimensionally detected at a high speed with a simple structure. SOLUT...

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Bibliographische Detailangaben
Hauptverfasser: NINOMIYA TAKANORI, KOBAYASHI IRARIO HARUOMI, NAKADA TOSHIHIKO, YOSHIMURA KAZUSHI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method for detecting photothermally displaced image and a photothermally displaced image detecting device in which the internal information for the surface of a sample and its vicinity can be two-dimensionally detected at a high speed with a simple structure. SOLUTION: A plurality of measuring points on a sample are simultaneously excited by a linear intensity modulated light 11, and the thermal expansion displacement generated in each point is simultaneously detected by utilizing the light interference between a linear probe light 18 and a reference light 19, thereby, the photothermal displacement signals in a plurality of measuring points of the sample are simultaneously detected. Since the photothermal displacement signals in the measuring points of the sample can be thus simultaneously detected in parallel, the two-dimensional information for the sample surface and the inner part can be detected at a high speed. A higher speed and a higher sensitivity can be simultaneously realized by the use of a common optical path type interferometer.