BEAM EMITTED PART MONITORING APPARATUS

PROBLEM TO BE SOLVED: To simultaneously continuously confirm the inner state of an electron beam emitting chamber and the emitting state of an electron beam to an object to be emitted. SOLUTION: The beam emitted part monitoring apparatus comprises an illuminator 55 provided in an emitting chamber 50 arranged with an electron beam generator 51 for emitting an electron beam 52 to an object 53 to be emitted and having a first filter 56, an observation camera 57 for photographing the chamber 50 by the light emitted from the illuminator 55, a fluorescent camera 61 hating a second filter 60 for transmitting only fluorescence 59 generated from the object 53 to be emitted to photograph the fluorescence 59 transmitted through the filter 60, an image processor 62 connected to the camera 61 and having a CRT 63, and a monitor 58 connected to the camera 57. The inner state in the chamber and the beam emitting state can be simultaneously, automatically and continuously confirmed to be able to improve the safety, operating efficiency and quality control.