BASE MATERIAL FOR EQUIPMENT, ITS PRODUCTION AND EQUIPMENT USING THE SAME

PROBLEM TO BE SOLVED: To form an electric insulating layer having thermally and mechanically high strength and corrosion resistance, made of a thin film having good adhesion property to a substrate, on the surface of a conductive substrate. SOLUTION: An oxide layer 2 comprising crystalline rutile-ty...

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Bibliographische Detailangaben
Hauptverfasser:	SATO KUNIO, FUNAKI MASAHIKO, KITAICHI SATOSHI, KIMOTO HIDETOSHI, NAKAMURA CHIAKI
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To form an electric insulating layer having thermally and mechanically high strength and corrosion resistance, made of a thin film having good adhesion property to a substrate, on the surface of a conductive substrate. SOLUTION: An oxide layer 2 comprising crystalline rutile-type TiO2 on the surface of a titanium substrate 1 by heating at 800-930 deg.C. The layer is preferably formed to 35-120μm thickness.