LIQUID CRYSTAL DISPLAY DEVICE AND ITS PRODUCTION
PROBLEM TO BE SOLVED: To make the shape of the respective two-terminal nonlinear elements within a display screen uniform and to eliminate the unequal display over the entire surface of a display screen by forming the upper electrodes of the two- terminal nonlinear elements together with island-shap...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To make the shape of the respective two-terminal nonlinear elements within a display screen uniform and to eliminate the unequal display over the entire surface of a display screen by forming the upper electrodes of the two- terminal nonlinear elements together with island-shaped parts. SOLUTION: A base coat insulating film 3 is formed on a glass substrate 2 and signal wirings 4 consisting of tantalum and branch lines (lower electrodes) 5 are formed on this base coat insulating film 3. Anodically oxidized insulating films 6 are formed on the surfaces of the signal wirings 4 and the lower electrodes 5 by an anodic oxidation method. The upper electrodes 7 consisting of aluminum, chromium, titanium, etc., are formed together with the island- shaped parts 10 on the anodically oxidized films 6 so as to have the parts overlapping on the lower electrodes 5. Further, the ends of the upper electrodes 7 are electrically connected to the pixel electrodes 9 consisting of ITO, etc., by which the element side substrate 1 is produced. Overetching is prevented at the time of patterning the upper electrodes 7 by etching and the capacity of the two-terminal nonlinear elements 8 is made uniform. |
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