HEAT TREATMENT DEVICE FOR GLASS SUBSTRATE FOR LIQUID CRYSTAL

PROBLEM TO BE SOLVED: To make a device, which thermally treats materials applied to a glass substrate for liquid crystal display for various purposes, compact and make the temperature distribution uniform by improving temperature raising and cooling characteristics. SOLUTION: A cavity part 4 is provided with an entrance part 2 and an exit part 3 for the glass substrate 16, and a single or a plurality of hot plates 5 for a temperature raising part 7, a plurality of hot plates 5 for a soaking part 8, and a plurality of hot plates 5 for a cooling part 9, and a cold plate 21 are provided in this order on the internal bottom surface of the cavity part 4 from the entrance part 2 to the exit part 3; and each hot plate 5 has a pin 13 stood on its top surface and a plurality of reflecting plates 6 are installed on the internal top surface of the opposite cavity part 4. Then the heat treatment device has the single wafer type conveying mechanism which support one glass substrate 16 with plural metal supporters 14 that can move vertically and horizontally and to the right and left and remounts and convey the respective hot plates 5 and cold plate 21 in order.