HEAT TREATMENT DEVICE FOR GLASS SUBSTRATE FOR LIQUID CRYSTAL

PROBLEM TO BE SOLVED: To obtain a sufficient temperature rise and sufficient cooling characteristics and make a heat treatment device main body compact by coating the surface of a hot plate with an alumina ceramic material. SOLUTION: On the internal reverse surface of a cavity part 4, two hot plates 5 and 6 for a temperature raising part 7, six hot plates 5 for a soaking part 8, three hot plates 5 for a cooling part 9, and one cold plate 19 are provided in order. The hot plates 5 are made of aluminum and their surfaces are coated with alumina ceramic materials. Consequently, the hot plates 5 are larger in surface radiation rate than a different aluminum plate and the radiation heat conduction quantity from the hot plates 5 to a glass substrate becomes large; and an alumite treatment is performed for a reflecting plate 6, so the surface radiation rate of the reflection plate 6 is high and the radiation heat conduction quantity from the reflecting plate 6 to the glass substrate becomes large. Consequently, the sufficient temperature rise and cooling characteristics can be obtained and the heat treatment device main body 1 can be shortened.