MOLECULAR PUMP

PROBLEM TO BE SOLVED: To provide a molecular pump having no possibility that leakage is generated from a connecting part of the pump to a vacuum container, and able to easily make the vacuum container into the super high vacuum state by performing sufficient baking processing. SOLUTION: A casing 1 o...

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Bibliographische Detailangaben
Hauptverfasser:	OKAMOTO MASATOMO, IGUCHI MASASHI
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a molecular pump having no possibility that leakage is generated from a connecting part of the pump to a vacuum container, and able to easily make the vacuum container into the super high vacuum state by performing sufficient baking processing. SOLUTION: A casing 1 of a turbo molecular pump is made of stainless steel, an electric heater 2 is installed upstream from the outer peripheral part of the casing 1, a jacket 3 is installed downstream from the outer peripheral part, and heating medium is allowed to circularly flow. High emissive coating is applied to stationary blades 4b,... on the downstream stage of a stator 4, stationary blade pressing rings 4e,..., and moving blades 5b,... on the downstream side stage of a rotor 5, and the stationary blade pressing rings 4d positioned in the boundary part between the electric heater 2 and the jacket 3 are made of ceramic having high heat insulting properties.