PLASMA-PRODUCING ELECTRODE

PROBLEM TO BE SOLVED: To control the plasma irradiation region, without moving an electrode by unevenly distributing place by place the electric field density on the surface of a plasma-producing electrode in which plasma treatment gas is passed around it. SOLUTION: Numerous conductive wires 24a, 24...

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Bibliographische Detailangaben
Hauptverfasser:	MATSUI TERUYUKI, SUGIURA YASUHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY CLADDING OR PLATING BY SOLDERING OR WELDING COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING DIAGNOSIS DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY HUMAN NECESSITIES HYGIENE IDENTIFICATION INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MACHINE TOOLS MEDICAL OR VETERINARY SCIENCE METAL-WORKING NOT OTHERWISE PROVIDED FOR METALLURGY MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE PERFORMING OPERATIONS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SOLDERING OR UNSOLDERING SURGERY TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To control the plasma irradiation region, without moving an electrode by unevenly distributing place by place the electric field density on the surface of a plasma-producing electrode in which plasma treatment gas is passed around it. SOLUTION: Numerous conductive wires 24a, 24b... are stretched in parallel in the frame 22 of an insulator, the left ends are commonly earthed 28 through resistance 26 and the right ends are connected to a high voltage generator 29, and equal voltage is applied to them. The part corresponding to an etching region 40 in each of the conductive wires 24a, 24b... is divided into small diameter parts, so that when voltage is applied, the electric field density on the surface is made higher than other parts. An electrode 20 having this constituting is placed on a base material 10, equal voltage is applied to the conductive wires 24a, 24b... from the high voltage generator 29, and plasma treatment gas 30 is sprayed to the surface of the base material 10 through the frame 22. Only the region corresponding to the etching region 40 where the wire is divided into small diameter parts on the surface of the base material 10 is plasma-treated, and thereby, only the specified part is simply, quickly treated without moving the electrode.