SHOWER HEAD NOZZLE OF CVD DEVICE

PROBLEM TO BE SOLVED: To improve the film forming rate without deteriorating the film quality by providing a shower head nozzle with a heat exchanging means and setting its thickness specific. SOLUTION: A shower head nozzle 11 is formed by a nozzle main body 13 arranged connectedly to a raw material...

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Bibliographische Detailangaben
Hauptverfasser:	ARAI ASAKO, INAISHI YOSHIAKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To improve the film forming rate without deteriorating the film quality by providing a shower head nozzle with a heat exchanging means and setting its thickness specific. SOLUTION: A shower head nozzle 11 is formed by a nozzle main body 13 arranged connectedly to a raw material feed tube 12 and a shower plate 14 freely attachably and detachably attached to the body 13. In the top board part 13a of the nozzle main body 13, passages 15 flowing through a heat exchanging fluid as a heat exchanging means are formed. The passages 15 are the one in which grooves are formed in the top board part 13a, the surfaces are sealed by cover materials, and tubes 15a and 15b forming the outlet and inlet ports of the fluid are connected thereto. The shower plate 14 has many raw material exhaust nozzles 16 and are formed by a metal plate having >=5mm thickness such as an Al alloy. In this way, thin film of good quality can be produced in a short time.