PROCESS MONITORING DEVICE AND METHOD THEREFOR

PROBLEM TO BE SOLVED: To provide a monitoring device, etc, which can accurately and easily detect the abnormal state of a process. SOLUTION: A reference data storage means 22 stores reference data as data corresponding to operation that the process should perform. A gathering decision start means 30...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	INUI KAZUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING PHYSICS
Online-Zugang:	Volltext bestellen
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