PROCESS MONITORING DEVICE AND METHOD THEREFOR

PROBLEM TO BE SOLVED: To provide a monitoring device, etc, which can accurately and easily detect the abnormal state of a process. SOLUTION: A reference data storage means 22 stores reference data as data corresponding to operation that the process should perform. A gathering decision start means 30 substantially operates an operation data gathering means 24 and an abnormality decision means 28 when the operation state that an operation state detecting means 28 detects corresponds to a specific operation state. The operation data gathering means 24 gathers the operation data as the data corresponding to the actual operation. The abnormality decision means 26 compares the reference data stored in the reference data storage means 22 with the operation data gathered by the operation data gathering means 24 to decide whether or not abnormality occurs to the process. Therefore, it can be decided as part of a program whether the abnormality occurs to the process.