PELLICLE STICKING DEVICE AND PELLICLE STICKING METHOD

PROBLEM TO BE SOLVED: To further improve the yield rate by providing a first test means, first and second mask transporting means, and a pellicle sticking means for sticking a pellicle to a mask transported by the second transport means. SOLUTION: A pellicle sticking device comprises a host computer 21, a mask washing device 22, a first mask test device 23, a second mask test device 24, a sticking device, a pellicle storing device, a pellicle test device and first and second mask test devices with a pellicle. Transport paths 30, 31 are formed by a closed path kept to a designated cleanliness, the movement of a mask, movement of a pellicle and movement of mask with a pellicle are performed by a transport device. Thus, the cleanliness in the pellicle sticking device 20 can be further secured, so that the yield rate in the pellicle sticking device 20 can be further improved.