PENTAPHENOLIC COMPOUND AND ITS APPLICATION TO PHOTOSENSITIVE AGENT

PROBLEM TO BE SOLVED: To obtain a new pentaphenolic compound useful as a photosensitive component of a photoresist composition or a material for the photosensitive component. SOLUTION: This pentaphenolic compound is shown by formula I (R to R are independently each H, or 1,2-naphthoquinone-diazide-4...

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Bibliographische Detailangaben
Hauptverfasser:	OZAKI HARUKI, INOUE HIROTAKA
Format:	Patent
Sprache:	eng
Schlagworte:	ACYCLIC OR CARBOCYCLIC COMPOUNDS APPARATUS SPECIALLY ADAPTED THEREFOR CHEMISTRY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR METALLURGY ORGANIC CHEMISTRY ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To obtain a new pentaphenolic compound useful as a photosensitive component of a photoresist composition or a material for the photosensitive component. SOLUTION: This pentaphenolic compound is shown by formula I (R to R are independently each H, or 1,2-naphthoquinone-diazide-4- or -5-sulfonyl of either formula II or formula III), including e.g. 2,6-bis[4-hydroxy-3-(2- hydroxy-5-methylbenzyl)2,5,6-trimethylbenzyl]-4-methylphenol, etc. The exemplified compound is obtained by a reaction of e.g. 2,6-bis(4-hydroxy-3- hydroxymethyl-2,5-dimethylbenzyl)-3,4-dimethylphenol with 2,5-xylenol. Furthermore, from a reaction of the exemplified compound with 1,2-naphthoquinone- diazide-4- or -5-sulfonyl halide, a compound of formula I in which at least one of R to R is of formula II or III is obtained.