EXPOSURE SYSTEM AND OPERATION THEREOF

PROBLEM TO BE SOLVED: To provide a good operation environment in response to the operation of an aligner and the skill of an operator, by limiting functions in a flexible and detailed manner. SOLUTION: With reference of a display section 16 of a terminal device 12, a user name and password thereof are inputted by an input device 18. A sub-function is selected and presence/absence of use limit is inputted. The user name, the password and the use limit data are stored in a memory 14. At the time of exposure, the operator inputs his/her own user name and password by the input device 18. Then, the use limit data storage in the memory 14 is referred to at the terminal device 12. When the operator uses the input device 18 to select a desired function to be executed by an aligner 10, the presence/ absence of the use limit is judged. If there is no use limit, that function is executed. If there is the use limit, it is displayed on the display section 16.