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PROBLEM TO BE SOLVED: To eliminate the occurrence of a fault in the fitting of a substrate even if the positions of a projection and a front rise part in an inner barrel fluctuate and to precisely operate the substrate to a prescribed position with simple constitution and a fitting means. SOLUTION:...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ONO KAZUHIKO, KAMEI SHINYA
Format: Patent
Sprache:eng
Schlagworte:
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