SUBSTRATE SUPPORTING APPARATUS

PROBLEM TO BE SOLVED: To smoothly and speedily lift a substrate from a substrate holder by providing an auxiliary lifting member to slight lift the substrate just before the substrate lifting action of a main lift to lift the periphery of the substrate laid on the holder from below. SOLUTION: A subs...

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Bibliographische Detailangaben
Hauptverfasser:	KAWAMURA HIDEJI, MATSUBARA HISATO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONVEYING DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY FREQUENCY-CHANGING HANDLING THIN OR FILAMENTARY MATERIAL HOLOGRAPHY MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS MATERIALS THEREFOR METAL-WORKING NOT OTHERWISE PROVIDED FOR NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS ORIGINALS THEREFOR PACKING PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To smoothly and speedily lift a substrate from a substrate holder by providing an auxiliary lifting member to slight lift the substrate just before the substrate lifting action of a main lift to lift the periphery of the substrate laid on the holder from below. SOLUTION: A substrate holder 2 has a substrate holding face 2d having holes 11a-11d corresponding to the four corners of the substrate support supported on its diagonal lines and these holes have substrate lifting pneumatic actuators 12a-12d. A pneumatic controller 6 controls the actuators such that they contact corresponding parts of the substrate 1 to slightly lift the contacted parts, drive a pneumatic up-down drive 5 to lift a lifter 3 to lift the substrate 1 through substrate support members 3a-3d at its lower center.