SAMPLE HOLDER FOR SECONDARY ION MASS SPECTROGRAPH

SAMPLE HOLDER FOR SECONDARY ION MASS SPECTROGRAPH

PROBLEM TO BE SOLVED: To pressing the tilt between sample surfaces so as to hold the flatness of a measurement surface causing the enhancement of the accuracy of concentration determination in a sample holder on which plural samples can be simultaneously loaded and which is used for a secondary ion...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: OGURO SHIZUO
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To pressing the tilt between sample surfaces so as to hold the flatness of a measurement surface causing the enhancement of the accuracy of concentration determination in a sample holder on which plural samples can be simultaneously loaded and which is used for a secondary ion mass spectrograph(SIMS). SOLUTION: In a sample holder for a secondary ion mass spectrograph on which plural samples can be simultaneously loaded, in order to hold the flatness of a thin plate with a measurement window (a surface thin plate) existing on the sample holder, a fixing portion 19 which can fix the surface thin plate 12 is provided on the sample holder base opening portion 18, the surface thin plate 12 is fixed at the thin plate peripheral portion and is simultaneously fixed to the fixing portion 19 of a holder base 11.