MULTIFUNCTION SAMPLE SURFACE ANALYZING DEVICE

PROBLEM TO BE SOLVED: To realize high resolution image observation and surface analysis far a micro area of a material surface by irradiating a sample with a primary electron beam from an electron gun for generating a desorption positive ion and a secondary electron beam, and separating them by utilizing polar difference for detection. SOLUTION: An exciting primary electron beam from an electron gun 1 is converged with a condenser lens 3 and an objective lens 6 so that a sample 7 is irradiated with it, and so that a desorption positive ion 18 and a secondary electron beam 17 are emitted from the sample 7. They are raised upward with a lens 6 and a deflecting plate 5, and voltage of positive and negative of the equal values is applied to the deflecting plate 5, so that the secondary electron 17 and the ion 18 are deflected left and right. The ion 18 is detected with a quadrupole mass spectrometer 8 and processed with a CPU 9, and displayed on a CRT 11 for ion image. Meanwhile, the secondary electron 17 is, through a post-deflection accelerating electrode 12 and a scintillator 13, detected with a photomultiplier 14, and displayed an a CRT 15 for electron image. Thanks to the assignment of such a detecting meter, focal distance of the lens 6 is shortened, and resolution is improved.