EQUIPMENT FOR INTEGRATING INTERFEROGRAM
PROBLEM TO BE SOLVED: To reduce sharply a burden on arithmetic processing by executing integration processing of unit interferograms shaped by a cutting means. SOLUTION: Equipment for integrating interferogram which integrates a plurality of unit interferograms each obtained by casting an interferen...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To reduce sharply a burden on arithmetic processing by executing integration processing of unit interferograms shaped by a cutting means. SOLUTION: Equipment for integrating interferogram which integrates a plurality of unit interferograms each obtained by casting an interference light of one scan on an object of measurement. It has a maximum position detecting means 16 which detects a center burst position from interferogram data stored in a unit interferogram storage means 14, a cutting means 18 which cuts the unit interferogram by a predetermined amount on the opposite sides on the positional axis thereof, using the center burst position of the unit interferogram detected by the maximum position detecting means 16 as reference, and collects the cut interferograms and an integrating means 20 which integrates a plurality of the cut interferograms 'it obtained sequentially in correspondence to a plurality of the unit interferograms. |
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