SEMICONDUCTOR MANUFACTURING SYSTEM

PROBLEM TO BE SOLVED: To obtain a solution to locally clean for promoting a highly purified environment of a semiconductor plant by considering maintainability. SOLUTION: In a lower purified clean room environment, products are carried by a conveyer car 21 and a conveying area including the conveyer...

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Bibliographische Detailangaben
Hauptverfasser:	SUZUKI YASUMICHI, IWASAKI TAKEMASA
Format:	Patent
Sprache:	eng
Schlagworte:	AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BASIC ELECTRIC ELEMENTS BLASTING CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL HEATING LIGHTING MECHANICAL ENGINEERING PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS RANGES SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING VENTILATING WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To obtain a solution to locally clean for promoting a highly purified environment of a semiconductor plant by considering maintainability. SOLUTION: In a lower purified clean room environment, products are carried by a conveyer car 21 and a conveying area including the conveyer car 21 is covered by a tunnel room 13 having an independent cleaning mechanism and a doorway for the semiconductor products having opening and closing mechanism prepared in the tunnel room 13 is connected to each processing apparatus 11. A vicinity of these apparatus is equipped with a prefabricated clean booth, a purified air supplying mechanism for this clean booth, and an ventilation mechanism removing dusts. Therefor, the environment of water surrounding is capable of keeping a higher cleanness and an initial cost and maintenance cost of a clean room can be decreased.