METHOD FOR EXCITING ELECTRON MICROSCOPE

PROBLEM TO BE SOLVED: To reduce the sample drift at the time of next start after concluding the use of an electron microscope. SOLUTION: When concluding the use of an electron microscope, an operator pushes a non-use time button of an input device 6. At this stage, a control device 5 commands a power source circuit 7 so as to generate the voltage lower than the accelerating voltage to be used in the normal using condition, and while commands a power source circuit 8 so as to generate the exciting current at a degree nearly equal to the exciting current in the normal using condition. Since the accelerating voltage at a some degree of high voltage is thereby secured at the time of non-use, an electron microscope can be quickly used after starting the electron microscope at the next time of use, and since the exciting current at a degree nearly equal to the exciting current in the normal using condition is supplied to a lens in non-use, thermal equilibrium state of an objective lens and a sample holder is maintained, and the sample drift at the next time of start can be remarkably reduced in comparison with the conventional method.