STRUCTURE OF FIELD-EFFECT EMISSION APPARATUS AND MANUFACTURE THEREOF

PROBLEM TO BE SOLVED: To provide a structure of a field-effect emission apparatus utilizing an effect of an intense electric field to emit electrons from a solid to vacuum and provide a method of manufacturing the field-effect emission apparatus. SOLUTION: The structure of this field-effect emission apparatus contains tips 1 to emit electrons, each tip 1 has a main body 2 made of a first material, main bodies 2 form resistors in series, the tips 1 are arranged in the centers of gate apertures 3, especially circular gate apertures formed by electrodes 4, and the tips 1 are projected upward out of the surface of the electrodes 4. The limiting size of the tips and that of the gate electrodes are made independently controllable and consequently, processing windows can be made wider and the apparatus can be manufactured easily. The threshold voltage of this apparatus to carry out emission is within an extremely narrow range and as a result high multiplexing property is obtained.