THIN FILM DEPOSITING DEVICE AND METHOD FOR DEPOSITING THIN FILM UTILIZING IT

PROBLEM TO BE SOLVED: To make it possible to deposit a thin film of an even thickness on a substrate, on which multiform films and the like exist, by a method wherein the temperature of a precursor solution transferred to a droplet spray device is adjusted, the precursor solution is made to convert...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BOKU KATSUYOSHI, BUN GENSEKI, U SEIICHI, TEI GENSHIN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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