FLAW INSPECTION DEVICE

PROBLEM TO BE SOLVED: To prolong the lifetime of a light source in case an argon laser or the like is adopted as light source. SOLUTION: At the time of inspection, the drive current I of a laser beam source 10 is controlled so that the light-quantity of laser beam becomes a constant inspection light-quantity and otherwise, the drive current I is made smaller than the value at inspection. The lifetime of the laser beam source can be prolonged when argon laser or the like is adopted, and thus a flaw inspection device is achieved which can sense a micro-flaw of any object to be inspected at a low running cost and with a high accuracy.