METHOD AND DEVICE FOR INSPECTION OF FOREIGN MATTER

PROBLEM TO BE SOLVED: To inspect matter inspection suck as a mask or reticle in the optimum position by rotating the mask or reticle using a rotating means, and changing the relative position to the scanning direction of a beam of light. SOLUTION: A foreign matter inspection device 21 is equipped with a rotary table 22 and a drive part 23, and the table 22 is rotated in the X-Y plane in the condition that a reticle 2 is placed thereon. The table 22 and drive part 23 are placed on a placing table 4 capable of moving in the Y-direction and coupled together by engagement of threads formed on the shaft 23A of the drive part with threaded grooves. The rotational amount of the table 22 and the number of revolutions are calculated by a rotational amount deciding device 24. The device 24 gives a drive signal to the drive part 23 so as to drive the shaft 23A, and the table 22 is rotated so that the reticle 2 is positioned at the decided angle. Then the placing table 4 is driven by the drive part 5 in the Y-direction while the inspection device 21 scans the surface of the reticle 2 with a scanning beam, and the inspection of the specified region is conducted.