LASER SCANNING TYPE MICROSCOPE
PROBLEM TO BE SOLVED: To provide the laser scanning type microscope which takes a precise measurement of line width in a short time and attains it by simple constitution. SOLUTION: In an optical path having an objective 23 for converging the laser light from a laser light source 11 on a sample 24, e...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | PROBLEM TO BE SOLVED: To provide the laser scanning type microscope which takes a precise measurement of line width in a short time and attains it by simple constitution. SOLUTION: In an optical path having an objective 23 for converging the laser light from a laser light source 11 on a sample 24, etc., galvanometers 16 and 19 which deflect the laser light horizontally and vertically to make a scan and an image rotator 20 which deflects the scanning laser light deflected by those galvanometers 16 and 19 in its rotational direction are arranged together. |
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