PRODUCTION OF POLYCRYSTALLINE SEMICONDUCTOR AND APPARATUS FOR PRODUCTION THEREFOR

PROBLEM TO BE SOLVED: To produce a semiconductor polycrystalline ingot which has high quality, is crystallographically excellent, is characterized by a low EPD value and is hardly crackable with good reproducibility at a low cost. SOLUTION: This process for producing the polycrystalline semiconducto...

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1. Verfasser:	OKUNO TETSUHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY COMPOUNDS THEREOF CRYSTAL GROWTH ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To produce a semiconductor polycrystalline ingot which has high quality, is crystallographically excellent, is characterized by a low EPD value and is hardly crackable with good reproducibility at a low cost. SOLUTION: This process for producing the polycrystalline semiconductor comprises charging a semiconductor material into a crucible 9 in an atmosphere inert to the semiconductor, heating and melting the semiconductor material by a heating means in this crucible 9 and allowing the molten material to solidify while depriving the crucible 9 of heat from its bottom, then cooling the crucible 9 to cool the solidified semiconductor material. The growth and annealing of the semiconductor crystals are alternately executed while the quantity of the heat released from the semiconductor material is periodically changed in the solidifying stage described above in this process. The objective apparatus for production is used for this process.