ELECTRON EMITTING ELEMENT AND MANUFACTURE THEREOF

PROBLEM TO BE SOLVED: To stably emit an electron and simplify a manufacturing process. SOLUTION: Helium is introduced into a first chamber 110 kept in 500Torr, Fe is evaporated to produce very fine Fe particles having a particle diameter of about 30nm, helium is introduced into a second chamber kept...

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1. Verfasser: IWAMOTO YOJI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To stably emit an electron and simplify a manufacturing process. SOLUTION: Helium is introduced into a first chamber 110 kept in 500Torr, Fe is evaporated to produce very fine Fe particles having a particle diameter of about 30nm, helium is introduced into a second chamber kept in 500Torr, MgO is evaporated to produce MgO very fine particles having a particle diameter of about 30nm. Both very fine particles are mixed in the mixing ratio of Fe:MgO=1:30 or so, and the mixture is introduced into a third chamber 130 kept in 5Torr. The mixed very fine particles ejected from a nozzle 131 are accumulated on a supporting board 101 to form a filling layer. The filling layer functions as a surface conductive type electron emission element which emits an electron from the surface when current flows.