GALVANOMIRROR AND OPTICAL DISK DEVICE USING THE SAME

PROBLEM TO BE SOLVED: To make a galvanomirror lightweight and small-sized in constitution possible to perform high-speed seeking. SOLUTION: The galvenomirror 9 is constituted by laminating two plates; a first plate 21 and a second plate 22. The first plate 21 consists of a stationary part 24, an oscillating part 25 and two elastic parts 26a, 26b which are integrally molded by anisotropic etching of a semiconductor mainly composed of silicon. The second plate 22 is formed out of an electrically insulating material, for example, glass plate, and is joined to the stationary part 24 of the first plate 21 by means, such as electrostatic joining. Further, comb tooth-shaped electrodes extending in nearly parallel with the line connecting the two elastic parts 26a, 26b are formed. plural recessed parts are inscribed on the corresponding second plate 22 side between the comb teeth of these electrodes.