SENSOR AND PREPARATION OF SENSOR

PROBLEM TO BE SOLVED: To surely establish effective contact connection for a sensor element with the use of a conductive layer by providing a conductive layer between a substrate and a silicon layer, and, by an insulation layer, insulating the conductive layer from the part of silicon layer. SOLUTIO...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YURUGEN KURURE, KAARUSUTEN FUNKU, ANDOREA SHIRUPU, FURANTSU REERUMAA, MIHIYAERU OTSUFUENBERUKU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES TESTING TRANSPORTING
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