SENSOR AND PREPARATION OF SENSOR

PROBLEM TO BE SOLVED: To surely establish effective contact connection for a sensor element with the use of a conductive layer by providing a conductive layer between a substrate and a silicon layer, and, by an insulation layer, insulating the conductive layer from the part of silicon layer. SOLUTIO...

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Bibliographische Detailangaben
Hauptverfasser:	YURUGEN KURURE, KAARUSUTEN FUNKU, ANDOREA SHIRUPU, FURANTSU REERUMAA, MIHIYAERU OTSUFUENBERUKU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To surely establish effective contact connection for a sensor element with the use of a conductive layer by providing a conductive layer between a substrate and a silicon layer, and, by an insulation layer, insulating the conductive layer from the part of silicon layer. SOLUTION: A frame 21 is configured as a rectangular frame, entirely enclosing one area. In the frame, an acceleration sensing element is assigned. An acceleration sensor is assigned. The acceleration sensor element contains the area fixed-connected to a substrate and the area separated from the substrate. It is an anchor area 22 and a connection element 25 that are fixed-connected to the substrate. Those separated from the substrate are a press bar 30, a deflection element 31, a viscous mass 32, a movable electrode 33 and fixed electrodes 34 and 35. If the movable element is so configured as to be bent by acceleration, a sensor element can be used as an acceleration sensor. In this case, with the use of multiple fixed electrodes 34 and 35, intense effective signal is obtained.