LASER MACHINING DEVICE
PROBLEM TO BE SOLVED: To provide a compact laser machining device, which is capable of irradiating a large object with a laser beam in an airtight process chamber. SOLUTION: A device is provided with a plurality of irradiating windows 10a, 10a... and 10e, which permeate laser beams, within the same...
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| creator | KAWAKUBO YUKIO SASAKI HIROHARU |
| description | PROBLEM TO BE SOLVED: To provide a compact laser machining device, which is capable of irradiating a large object with a laser beam in an airtight process chamber. SOLUTION: A device is provided with a plurality of irradiating windows 10a, 10a... and 10e, which permeate laser beams, within the same plane on the laser beam introducing side of a process chamber 5. Therefore, a process stage whereupon an object is fixed can be moved by a short distance equivalent to the distance of the laser beam non-permeating area between the neighboring irradiation windows, even when a large area subject is to be processed, and a plurality of discrete irradiating windows are permitted to have a function of one large area irradiation window equivalent to the whole area of the object. Thus, the laser machining device, compact and capable of irradiating a large object with a laser beam in an airtight process chamber. |
| format | Patent |
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SOLUTION: A device is provided with a plurality of irradiating windows 10a, 10a... and 10e, which permeate laser beams, within the same plane on the laser beam introducing side of a process chamber 5. Therefore, a process stage whereupon an object is fixed can be moved by a short distance equivalent to the distance of the laser beam non-permeating area between the neighboring irradiation windows, even when a large area subject is to be processed, and a plurality of discrete irradiating windows are permitted to have a function of one large area irradiation window equivalent to the whole area of the object. 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SOLUTION: A device is provided with a plurality of irradiating windows 10a, 10a... and 10e, which permeate laser beams, within the same plane on the laser beam introducing side of a process chamber 5. Therefore, a process stage whereupon an object is fixed can be moved by a short distance equivalent to the distance of the laser beam non-permeating area between the neighboring irradiation windows, even when a large area subject is to be processed, and a plurality of discrete irradiating windows are permitted to have a function of one large area irradiation window equivalent to the whole area of the object. Thus, the laser machining device, compact and capable of irradiating a large object with a laser beam in an airtight process chamber.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF |
| title | LASER MACHINING DEVICE |
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