LASER MACHINING DEVICE

LASER MACHINING DEVICE

PROBLEM TO BE SOLVED: To provide a compact laser machining device, which is capable of irradiating a large object with a laser beam in an airtight process chamber. SOLUTION: A device is provided with a plurality of irradiating windows 10a, 10a... and 10e, which permeate laser beams, within the same...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KAWAKUBO YUKIO, SASAKI HIROHARU
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FREQUENCY-CHANGING
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL LOGIC ELEMENTS
OPTICS
PHYSICS
SEMICONDUCTOR DEVICES
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a compact laser machining device, which is capable of irradiating a large object with a laser beam in an airtight process chamber. SOLUTION: A device is provided with a plurality of irradiating windows 10a, 10a... and 10e, which permeate laser beams, within the same plane on the laser beam introducing side of a process chamber 5. Therefore, a process stage whereupon an object is fixed can be moved by a short distance equivalent to the distance of the laser beam non-permeating area between the neighboring irradiation windows, even when a large area subject is to be processed, and a plurality of discrete irradiating windows are permitted to have a function of one large area irradiation window equivalent to the whole area of the object. Thus, the laser machining device, compact and capable of irradiating a large object with a laser beam in an airtight process chamber.