SYSTEM AND METHOD FOR CONTROLLING SEMICONDUCTOR DEVICE MANUFACTURING PROCESS

PROBLEM TO BE SOLVED: To prevent the generation of defectives and the deterioration of quality by stopping the operation of a process execution device by an operation stand-by command when the back-up of process program information transmitted from the process execution device and information from a...

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Bibliographische Detailangaben
Hauptverfasser:	KIN SOUUN, RI ZAIKIYOU, SAI SOUKOKU
Format:	Patent
Sprache:	eng
Schlagworte:	ANALOGUE COMPUTERS BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING CONVEYING COUNTING DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FORADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORYOR FORECASTING PURPOSES ELECTRIC DIGITAL DATA PROCESSING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS HANDLING THIN OR FILAMENTARY MATERIAL MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS REGULATING SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE,COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTINGPURPOSES, NOT OTHERWISE PROVIDED FOR TESTING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To prevent the generation of defectives and the deterioration of quality by stopping the operation of a process execution device by an operation stand-by command when the back-up of process program information transmitted from the process execution device and information from a main host computer differ. SOLUTION: A control system transmits preset wafer information to a host computer 20 as a PPID1 or PPID2 process. When the host computer 20 transmits a PPID value and an operation start command to a diffusion furnace 30 on the basis of a process command and information transmitted, a mode is set under an initialization state for conducting a program and the PPID value received is backed up to the host computer 20 in the diffusion furnace 30. The host computer 20 compares the backed-up PPID value with the transmitted PPID value, a separate command is not transmitted to the diffusion furnace 30 when both values coincide, and an operation stand-by command is transmitted to the diffusion furnace 30 and the progress of a process is stopped when both values do not agree.