ION BEAM MEASURING DEVICE FOR PARTICLE-INDUCED X-RAY ANALYZER

PROBLEM TO BE SOLVED: To provide an ion beam measuring device capable of exactly and simply observing ion beam in a particle induced X-ray analyzer from the very front and measuring the current quantity. SOLUTION: In the front position in the ion beam progressing direction of an analysis chamber 23, a case 2 is fixed air-tightly, and to this case 2, an introduction path 5 for the ion beam is provided. On the way of the ion beam introduction path 5, a column shape current measurement rod 3 is fixed in the perpendicular direction air-tightly and rotatably around the axis. In the current measurement rod 3, an ion beam path hole 8 in perpendicular direction to the axis is formed. On the ion beam introduction path 5 in the progression direction side of the ion beam from the current measurement rod 3, a transparent luminescent plate 4 provided with a luminous thin film is placed so as to be observed from outside. On one of two different rotation angles of the current measurement rod 3, the ion beam is shielded to measure its current, and on the other, the ion beam is let reach the luminescent plate 4 by way of the ion beam path hole 8 to observe the luminescence profile of the luminescence thin film from the front.