ION BEAM COLLIMATOR FOR PARTICLE-INDUCED X-RAY ANALYZER

PROBLEM TO BE SOLVED: To provide an ion beam collimator which can easily select one of two ion beam path holes with different diameters and exactly adjust to the ion beam by finely controlling the position and angle of the path hole. SOLUTION: An ion beam collimator 1 rotates around a slit axis 4 an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WAKASA HIDEICHIRO, NAKANISHI NORIYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY GAMMA RAY OR X-RAY MICROSCOPES INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES IRRADIATION DEVICES MEASURING NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR TESTING
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