ION BEAM COLLIMATOR FOR PARTICLE-INDUCED X-RAY ANALYZER

PROBLEM TO BE SOLVED: To provide an ion beam collimator which can easily select one of two ion beam path holes with different diameters and exactly adjust to the ion beam by finely controlling the position and angle of the path hole. SOLUTION: An ion beam collimator 1 rotates around a slit axis 4 an...

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Bibliographische Detailangaben
Hauptverfasser:	WAKASA HIDEICHIRO, NAKANISHI NORIYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY GAMMA RAY OR X-RAY MICROSCOPES INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES IRRADIATION DEVICES MEASURING NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an ion beam collimator which can easily select one of two ion beam path holes with different diameters and exactly adjust to the ion beam by finely controlling the position and angle of the path hole. SOLUTION: An ion beam collimator 1 rotates around a slit axis 4 and path hole 12 and path hole 13 are selectively connected to the path hole 9 of a slit body 3 so as to switch large and small, diameters of the ion beam cross section. By rotating the slit body around the axis, the path holes 9, 12, 13 and 15 are biased to adjust to the irradiation angle of the ion beam passing in a transport duct 52. By moving the slit axis 4 and axis lines X and Y directions of the slit body 3, the path holes 9, 12, 13 and 15 are displaced to adjust to the irradiation position of the ion beam passing in the transport duct 52. Even if the path hole 15 has a small diameter, the amount of ion lost by impinging to the inner wall of the hole is small and a bias of the ion beam by the effect of hole edge does not occur.