METAL CANTILEVER, INTERATOMIC FORCE MICROSCOPE AND SCANNING ELECTROSTATIC CAPACITY MICROSCOPE COMPOSITE DEVICE, AND INTERATOMIC FORCE MICROSCOPE, SCANNING ELECTROSTATIC MICROSCOPE AND SCANNING TUNNEL MICROSCOPE COMPOSITE DEVICE

PROBLEM TO BE SOLVED: To provide an interatomic force microscope and scanning electrostatic capacity microscope composite device by using a metal cantilever made of a wire and having a sharp tip section and a bend section at the center. SOLUTION: This wire type cantilever 9 has a sharpened and bent metal wire. The cantilever 9 is moved near to a sample, the capacity between the sample and a probe 12 is measured, and the irregularities on the surface of the sample are detected. The tip of a tungsten wire is sharpened, for example, and the L-shaped wire bent by about 90 deg. is used as the cantilever 9. The vertical portion at the front of the bend section 11 becomes the probe 12. The horizontal portion 13 on the holder 10 side is a portion generating a warp (bend). When the horizontal portion 13 is bent, the cantilever 9 is vertically moved in response to the irregularities on the surface of the sample. One microscope device can be utilized as an interatomic force microscope, an electrostatic capacity microscope, and a scanning tunnel microscope.