BARRIER SEAL FOR ELECTROSTATIC CHUCK

BARRIER SEAL FOR ELECTROSTATIC CHUCK

PROBLEM TO BE SOLVED: To provide an electrostatic chuck in which the failure rate is reduced by enhancing the corrosion resistance in corrosive process environment. SOLUTION: An electrostatic chuck 20 generally comprises an electrode 30, and an electrostatic member 25 having an insulator covering th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JIYON EFU KIYAMERON, MAIKERU JII CHIYAFUIN, CHIYANDORA DESHIYUPANDEI, DENISU GURIMAADO, ROBAATO RAIAN, JIYOSEFU SARUFUERUDA
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide an electrostatic chuck in which the failure rate is reduced by enhancing the corrosion resistance in corrosive process environment. SOLUTION: An electrostatic chuck 20 generally comprises an electrode 30, and an electrostatic member 25 having an insulator covering the electrode. A barrier 55 has a first contact face 60 being depressed against the outer edge 50 of a substrate 45 in order to reduce exposure of the electrostatic member 25 in electrostatic chuck 20 to a corrosive environment.