HOLDING DEVICE FOR SUBSTRATE

PURPOSE: To simplify a position detecting mechanism for substrate on a substrate and to improve prealignment precision. CONSTITUTION: An abutting member 22 to come into contact with a substrate is provided with a prealignment mark 25 for detection of position. The position of the prealignment mark 2...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	MATSUBARA HISATO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	PURPOSE: To simplify a position detecting mechanism for substrate on a substrate and to improve prealignment precision. CONSTITUTION: An abutting member 22 to come into contact with a substrate is provided with a prealignment mark 25 for detection of position. The position of the prealignment mark 25 is detected by a position detecting means disposed independently of a holing means to hold the substrate and a driving means 23, so that only a simplified driving means 23 is mounted on the holding means. Also the structure of the abutting member 22 and the driving means 23 can be simplified.