CONTACT-TYPE LINE SENSOR OF UNEVENNESS INFORMATION ON SURFACE

PURPOSE: To obtain a contact-type sensor by which the flaw, of a product, which is hard to optically detect such as a flaw in a same color, a black flaw, etc., can be detected automatically without generating a blind spot by a method wherein a comb tooth-shaped probe which has been bent in the middle is brought into contact with an object, to be inspected, so as to be scanned and the strain, of the probe, which is generated by the unevenness of a surface is detected by a piezoelectric element. CONSTITUTION: As a comb tooth-shaped line probe, a line probe which has been bent in the middle is used so as not to generate a blind spot when it comes into contact with a product. A silicon thin film 9 which has been doped with phosphorus and continuity patterns 10, 11 are formed on the root part of the line probe by a vapor growth method, a piezoelectric element is formed, and a line sensor 50 is formed. The line sensor 50 is fixed by a holding utensil 51 in such a way that the contact angle 37 of the center line of the tip of the sensor with the face of the product becomes, e.g. 80 deg. or higher. Then, products 53c, 53b, 53a are conveyed by a conveyor 54, they are brought into contact with the line sensor 50, a signal from the tip of the probe is amplified ADD-converted and image-processed and the flaw of the products is detected automatically.